JPS6237080U - - Google Patents
Info
- Publication number
- JPS6237080U JPS6237080U JP12689885U JP12689885U JPS6237080U JP S6237080 U JPS6237080 U JP S6237080U JP 12689885 U JP12689885 U JP 12689885U JP 12689885 U JP12689885 U JP 12689885U JP S6237080 U JPS6237080 U JP S6237080U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation source
- vacuum
- planet
- supported
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12689885U JPS6237080U (en]) | 1985-08-19 | 1985-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12689885U JPS6237080U (en]) | 1985-08-19 | 1985-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6237080U true JPS6237080U (en]) | 1987-03-05 |
Family
ID=31021134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12689885U Pending JPS6237080U (en]) | 1985-08-19 | 1985-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6237080U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5130103A (en) * | 1974-09-05 | 1976-03-15 | Ageyuki Ito | Doheki oyobi gakekuzuretobogyokojihoto sonosochi |
-
1985
- 1985-08-19 JP JP12689885U patent/JPS6237080U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5130103A (en) * | 1974-09-05 | 1976-03-15 | Ageyuki Ito | Doheki oyobi gakekuzuretobogyokojihoto sonosochi |